DLP® Technology for
Lithography
Maskless Lithography and DLP® Technology
Digital Light Processing (DLP) technology is crucial to maskless lithography, a method for creating micro- and nanostructures without physical masks. Unlike traditional lithography, which uses masks to transfer patterns onto photoresist, maskless lithography projects patterns directly, offering greater flexibility and cost savings, particularly for small batches or frequent design adjustments.
Maskless Lithography by DLP® Subsystems
In maskless lithography supported by ViALUX's advanced V‑Modules, precise patterns are exposed directly onto light-sensitive surfaces using digital micromirror devices (DMDs). This approach enables high-precision patterning without physical masks, making it an ideal and efficient method for microfabrication. DLP® technology is based on a digital micromirror device (DMD), which consists of millions of tiny mirrors that are able to direct light with high precision. The ViALUX Controller Suite (API) enables the individual control of each mirror within a V-Module, allowing the digital projection of a desired pattern onto the photoresist. This flexibility allows designs to be quickly customized without the need for physical masks.
